Facilities Home

Clean Room Home


Material Characterization


Plasma Etch Equipment

Photoluminescence Equipment

Southern Methodist University
School of Engineering
Link to Dallas LEOS Section Department of Electrical Engineering


The SMU Clean Room

The SMU Clean Room has a class 10 photolithography area and a class 1000 main area. A partial list of equipment in the clean room includes: hoods, photoresist spinners, contact mask aligners, thermal evaporator, plasma asher, plasma etcher, turbo-pumped reactive ion etcher, ion beam etch system, microprobe stations, ultrasonic cleaners, sputtering system, plasma-enhanced chemical vapor deposition (PECVD) system, e-beam evaporator, photoluminescence system, ellipsometers and profilometers. Support outside the clean room includes a scanning electron microscope, atomic force microscope, wafer lapper, wafer saw, and cleave and scribe tools. The pictures of the SMU Clean room equipment are shown below:










Please send any questions or comments about this website to Jingjie Zhao (Carolyn) at CarolynZhao@gmail.com.

Number of Visitors since July 2004: