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Southern Methodist University |
| School of Engineering | |
| Link to Dallas LEOS Section | Department of Electrical Engineering |
The SMU Clean Room
The SMU Clean Room has a class 10 photolithography area and a class 1000 main area. A partial list of equipment in the clean room includes: hoods, photoresist spinners, contact mask aligners, thermal evaporator, plasma asher, plasma etcher, turbo-pumped reactive ion etcher, ion beam etch system, microprobe stations, ultrasonic cleaners, sputtering system, plasma-enhanced chemical vapor deposition (PECVD) system, e-beam evaporator, photoluminescence system, ellipsometers and profilometers. Support outside the clean room includes a scanning electron microscope, atomic force microscope, wafer lapper, wafer saw, and cleave and scribe tools. The pictures of the SMU Clean room equipment are shown below:
- Photolithography
- Material Characterization
- Deposition
- Plasma Etch Equipment
- Photoluminescence Equipment