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Photolithography

Material Characterization

Deposition

Plasma Etch Equipment

Photoluminescence Equipment

Southern Methodist University
School of Engineering
Link to Dallas LEOS Section Department of Electrical Engineering

 

SMU Clean Room: Photolithography Room

HTG Maskaligner

MJB-3 Maskaligner

Manual Spinner

Photolithography Bake Ovens

 

Solvent Hoods

 

 

 

 


Please send any questions or comments about this website to Jingjie Zhao (Carolyn) at CarolynZhao@gmail.com.

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